Surface Analysis Tools
Surface analysis tools are important in the research and manufacture of semiconductors.
FIB-TOF-SIMS
FIB-TOF-SIMS
The Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer (FIB-TOF-SIMS) made by Toyama is a very useful tool in this field.
Simultaneous Scanning Electron Microscope observations can be performed on the same field of view of the Focused Ion Beam, which makes it possible to obtain Secondary Ion Mass Spectrometer data with minimum damage. For more information go to FIB-TOF-SIMS under Analytical insturments.